Title :
A New Approach to Failure Analysis and Yield Enhancement of Very Large-scale Integrated Systems
Author :
Amakawa, Shuhei ; Nakazato, Kazuo ; Mizuta, Hiroshi
Author_Institution :
University of Cambridge, United Kingdom
fDate :
24-26 September 2002
Keywords :
Current measurement; Failure analysis; Laboratories; Leakage current; MOSFETs; Microelectronics; Probability distribution; Random access memory; Tunneling; Very large scale integration;
Conference_Titel :
Solid-State Device Research Conference, 2002. Proceeding of the 32nd European
Print_ISBN :
88-900847-8-2
DOI :
10.1109/ESSDERC.2002.194891