• DocumentCode
    1921427
  • Title

    A New Approach to Failure Analysis and Yield Enhancement of Very Large-scale Integrated Systems

  • Author

    Amakawa, Shuhei ; Nakazato, Kazuo ; Mizuta, Hiroshi

  • Author_Institution
    University of Cambridge, United Kingdom
  • fYear
    2002
  • fDate
    24-26 September 2002
  • Firstpage
    147
  • Lastpage
    150
  • Keywords
    Current measurement; Failure analysis; Laboratories; Leakage current; MOSFETs; Microelectronics; Probability distribution; Random access memory; Tunneling; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 2002. Proceeding of the 32nd European
  • Print_ISBN
    88-900847-8-2
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2002.194891
  • Filename
    1503821
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1921427