MEMS, Ka-band single-pole double-throw (SPDT) switch for switched line phase shifters

Author

Scardelletti, Maximilian C. ; Ponchak, George E. ; Varaljay, Nicholas C.

Author_Institution

NASA Glenn Res. Center, Cleveland, OH, USA

Volume

2

fYear

2002

fDate

2002

Firstpage

2

Abstract

Ka-band MEMS doubly anchored cantilever beam capacitive shunt devices are used to demonstrate a MEMS SPDT switch fabricated on high resistivity silicon (HRS) utilizing finite ground coplanar waveguide (FGC) transmission lines. The SPDT switch has an insertion loss (IL), return loss (RL), and isolation of 0.3 dB, 40 dB, and 30 dB, respectively, at Ka-band.

Keywords

antenna feeds; coplanar transmission lines; coplanar waveguide components; micromachining; microswitches; microwave phase shifters; microwave switches; silicon; substrates; 26.5 GHz; Ka-band; MEMS; SPDT switch; Si; capacitive shunt devices; doubly anchored cantilever beam devices; finite ground coplanar waveguide; high resistivity silicon substrate; insertion loss; isolation; phased array antennas; return loss; single-pole double-throw switch; switched line phase shifters; transmission lines; Communication switching; Coplanar transmission lines; Coplanar waveguides; Frequency; Micromechanical devices; Phase shifters; Power transmission lines; Silicon; Structural beams; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Antennas and Propagation Society International Symposium, 2002. IEEE

Print_ISBN

0-7803-7330-8

Type

conf

DOI

10.1109/APS.2002.1016014

Filename

1016014