Membrane-supported copper E-plane circuits

Author

Liu, W.Y. ; Steenson, D.P. ; Steer, M.B.

Author_Institution

Inst. for Microwave & Photonics, Leeds Univ., UK

Volume

1

fYear

2001

fDate

20-24 May 2001

Firstpage

539

Abstract

This paper reports the realization of copper E-plane circuits on a micromachined 5 micron thick organic membrane. As the membrane is both thin and optically smooth, dielectric loss and the excitation of surface modes are virtually eliminated. Measured losses of lines are no more than 0.4 dB/cm at W-band. The relatively low-cost low-temperature process uses a photosensitive resin (SU-8) to form a self-supporting membrane on which devices can be mounted. The realization a finline resonator and an E-plane bandpass filter are presented.

Keywords

band-pass filters; copper; fin line components; membranes; micromachining; millimetre wave circuits; millimetre wave filters; passive filters; resonators; 107 GHz; 5 micron; 81.5 GHz; Cu; Cu E-plane circuits; E-plane bandpass filter; EHF; SU-8; W-band; finline resonator; low-cost low-temperature process; membrane-supported E-plane circuits; micromachined organic membrane; photosensitive resin; self-supporting membrane; Biomembranes; Circuits; Copper; Dielectric loss measurement; Dielectric losses; Dielectric measurements; Loss measurement; Optical filters; Optical losses; Optical resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2001 IEEE MTT-S International

Conference_Location

Phoenix, AZ, USA

ISSN

0149-645X

Print_ISBN

0-7803-6538-0

Type

conf

DOI

10.1109/MWSYM.2001.966950

Filename

966950