10.1: New functioned field emission array to controllable initial emission angle by introducing a suppressor gate

We have proposed the new micro column electron beam microscope fabricated with multi-gated field emitter array based on the first result that a crossover successfully observed with quintuple-gated FEA. In order to realize the fine focused electron beam less than several ten nm in diameter, the initial emission angle after emitting from tip surface has to be controlled narrowly. In this report, it was described that we have introduced a suppressor gate which was located below tip and fabricated double-gated field emitter array with extractor. It was demonstrated that the suppressor gate had an emission angle narrowed successfully.