DocumentCode
1922183
Title
Phase-shifting interferometry to determine the absolute diameter of a silicon sphere using a frequency-tunable diode laser
Author
Xuejian Wu ; Yan Li ; Haoyun Wei ; Jitao Zhang
Author_Institution
Dept. of Precision Instrum., Tsinghua Univ., Beijing, China
fYear
2013
fDate
12-16 May 2013
Firstpage
1
Lastpage
1
Abstract
In this contribution, a chain of temporal synthetic wavelengths, generated by use of a frequency-tunable diode laser calibrated by an optical frequency comb, is used to measure the absolute diameter with an accuracy of 3 nm in air, where the fractional interference phase is measured by phase-shifting interferometry.
Keywords
diameter measurement; elemental semiconductors; laser tuning; measurement by laser beam; phase shifting interferometry; semiconductor lasers; silicon; Si; absolute diameter; fractional interference phase; frequency-tunable diode laser; optical frequency comb; phase-shifting interferometry; silicon sphere; temporal synthetic wavelengths; Frequency measurement; Measurement by laser beam; Optical interferometry; Phase measurement; Phase shifting interferometry; Semiconductor lasers; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe (CLEO EUROPE/IQEC), 2013 Conference on and International Quantum Electronics Conference
Conference_Location
Munich
Print_ISBN
978-1-4799-0593-5
Type
conf
DOI
10.1109/CLEOE-IQEC.2013.6801197
Filename
6801197
Link To Document