Microwave assisted low temperature solid phase crystallization of ferroelectric thin films

Sol-gel-derived ferroelectric thin films of PZT (lead zirconate titanate) and PLZT (lead lanthanum zirconate titanate) have been successfully processed using internal heating with microwave energy. Pyrolysis and crystallization of films in the microwave field were fast, and showed good selectivity. The nature of xerogel plays an important role in the pyrolysis and crystallization of these films because of good coupling of the microwaves with these dipole-containing species. The microwave-processed films exhibit respectable dielectric and ferroelectric properties