Fabrication of double rectangular type FeTaN film inductor

Author

Shin, Dong-hoon ; Choong-Sik Kim ; Lee, Chang-Ho ; Nam, Seoung-eui ; Hyoung-June Kim

Author_Institution

Hong-lk University

fYear

1999

fDate

18-21 May 1999

Keywords

Coils; Degradation; Fabrication; Frequency response; Inductance; Magnetic films; Q factor; Resonance; Resonant frequency; Thin film inductors;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-5555-5

Type

DOI

10.1109/INTMAG.1999.837220

Filename

837220

Link To Document