Title :
Effects of Random Discrete Impurities in Ultra-short MOSFET Using 3D Monte Carlo Simulation
Author :
Barraud, Sylvain ; Dollfus, Philippe ; Galdin, Sylvie ; Hesto, Patrice
Author_Institution :
IEF-CNRS, Universite Paris sud, Orsay, France
fDate :
24-26 September 2002
Keywords :
Charge carrier processes; Computational modeling; Doping; Electrons; Fluctuations; Impurities; MOSFET circuits; Particle scattering; Poisson equations; Semiconductor process modeling;
Conference_Titel :
Solid-State Device Research Conference, 2002. Proceeding of the 32nd European
Print_ISBN :
88-900847-8-2
DOI :
10.1109/ESSDERC.2002.194939