Title :
The study of PZT ferroelectric thin film and composite with amorphous silicon
Author :
Ling, Wang Yong ; Huai, Wu Dao ; Ting, Chen Hui ; Wei, Yu Da
Author_Institution :
Shanghai Inst. of Ceramics, Chinese Acad. of Sci., China
fDate :
30 Aug-2 Sep 1992
Abstract :
The remanant polarization and coercive field of PZT (lead zirconate titanate) ceramics have been investigated as a function of specimen thickness. The properties of PZT thin film prepared by RF sputtering were also studied. In addition, novel optical devices with composite amorphous silicon and PZT ceramics were designed
Keywords :
amorphous semiconductors; ceramics; composite material interfaces; composite materials; dielectric hysteresis; dielectric polarisation; elemental semiconductors; ferroelectric thin films; lead compounds; silicon; sputtered coatings; PZT ferroelectric thin film; PZT-Si; PbZrO3TiO3; PbZrO3TiO3-Si; RF sputtering; ceramics; coercive field; ferroelectric hysteresis loop; optical devices; remanant polarization; specimen thickness; Amorphous silicon; Ceramics; Ferroelectric materials; Optical design; Optical devices; Optical polarization; Radio frequency; Sputtering; Titanium compounds; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 1992. ISAF '92., Proceedings of the Eighth IEEE International Symposium on
Conference_Location :
Greenville, SC
Print_ISBN :
0-7803-0465-9
DOI :
10.1109/ISAF.1992.300706
