Reduction of Bitline to Control Gate Leakage for Improved Embedded 0.18 um FLASH Yield and Reliability

Author

Cacciato, A. ; Nelson, S. ; Diekema, M. ; Hendriks, M. ; van Marwijk, L. ; Deuper, C. ; Gerritsen, E. ; Verhaar, R. ; Dormans, D.

Author_Institution

Philips Semiconductors, Nijmegen, The Netherlands

fYear

2002

fDate

24-26 September 2002

Firstpage

355

Lastpage

358

Keywords

Gate leakage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2002. Proceeding of the 32nd European

Print_ISBN

88-900847-8-2

Type

DOI

10.1109/ESSDERC.2002.194942

Filename

1503872

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