Title :
Review on Microwave and Millimeter Filters Using MEMS Technology
Author :
Jaimes-Vera, Aline ; Llamas-Garro, Ignacio ; Corona-Chavez, Alonso ; Zaldivar-Huerta, Ignacio
Author_Institution :
Electron. Dept., Nat. Inst. for Astrophys., Opt. & Electron., Puebla
Abstract :
Several different fabrication techniques and materials have been proposed for the realization of low loss high-Q micromachined filters or tunable filters. In this paper a review of several filters that have been proposed over the last years is presented, including a discussion of topologies and the structures used to make microwave filters
Keywords :
micromachining; micromechanical devices; microwave filters; microwave materials; millimetre wave filters; MEMS technology; fabrication technique; low loss high-Q micromachined filter; material; microwave filter; millimeter filter; tunable filter; Micromechanical devices; Microstrip filters; Microwave filters; Microwave technology; Millimeter wave technology; Optical filters; Radio frequency; Resonator filters; Topology; Tunable circuits and devices;
Conference_Titel :
Electronics, Communications and Computers, 2007. CONIELECOMP '07. 17th International Conference on
Conference_Location :
Cholula, Puebla
Print_ISBN :
0-7695-2799-X
Electronic_ISBN :
0-7695-2799-X
DOI :
10.1109/CONIELECOMP.2007.31
