• DocumentCode
    1922945
  • Title

    Review on Microwave and Millimeter Filters Using MEMS Technology

  • Author

    Jaimes-Vera, Aline ; Llamas-Garro, Ignacio ; Corona-Chavez, Alonso ; Zaldivar-Huerta, Ignacio

  • Author_Institution
    Electron. Dept., Nat. Inst. for Astrophys., Opt. & Electron., Puebla
  • fYear
    2007
  • fDate
    26-28 Feb. 2007
  • Firstpage
    26
  • Lastpage
    26
  • Abstract
    Several different fabrication techniques and materials have been proposed for the realization of low loss high-Q micromachined filters or tunable filters. In this paper a review of several filters that have been proposed over the last years is presented, including a discussion of topologies and the structures used to make microwave filters
  • Keywords
    micromachining; micromechanical devices; microwave filters; microwave materials; millimetre wave filters; MEMS technology; fabrication technique; low loss high-Q micromachined filter; material; microwave filter; millimeter filter; tunable filter; Micromechanical devices; Microstrip filters; Microwave filters; Microwave technology; Millimeter wave technology; Optical filters; Radio frequency; Resonator filters; Topology; Tunable circuits and devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics, Communications and Computers, 2007. CONIELECOMP '07. 17th International Conference on
  • Conference_Location
    Cholula, Puebla
  • Print_ISBN
    0-7695-2799-X
  • Electronic_ISBN
    0-7695-2799-X
  • Type

    conf

  • DOI
    10.1109/CONIELECOMP.2007.31
  • Filename
    4127266
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1922945