Title :
Electrode effects on electrical properties of ferroelectric thin films
Author :
Vijay, D.P. ; Kwok, C.K. ; Pan, W. ; Yoo, I.K. ; Desu, S.B.
Author_Institution :
Dept. of Mater. Eng., Virginia Polytech. Inst. & State Univ., Blacksburg, VA, USA
fDate :
30 Aug-2 Sep 1992
Abstract :
The degradation phenomena of lead zirconate titanate (PZT) films were investigated on Pt and RuOx electrodes. The hysteresis properties were measured for different Zr/Ti ratios. Films with composition close to the morphotropic phase boundary showed high P r and low Ec values on RuOx electrodes for up to 2×1011 test cycles. The degradation properties were studied as a function of film thickness by an accelerated unified test which can evaluate fatigue and breakdown simultaneously. It was observed that thinner PZT films on RuOx electrodes showed the best electrical properties. Furthermore, under a DC field the thinner films showed lower leakage current and higher breakdown fields
Keywords :
ceramics; dielectric hysteresis; electric breakdown of solids; fatigue; ferroelectric thin films; lead compounds; leakage currents; PZT-Pt; PZT-RuOx; PbZrO3TiO3-Pt; PbZrO3TiO3-RuO; Pt electrodes; RuOx electrodes; breakdown fields; degradation phenomena; electrical properties; fatigue; ferroelectric thin films; film thickness; hysteresis properties; leakage current; morphotropic phase boundary; Degradation; Electric breakdown; Electrodes; Ferroelectric films; Ferroelectric materials; Hysteresis; Life estimation; Testing; Titanium compounds; Zirconium;
Conference_Titel :
Applications of Ferroelectrics, 1992. ISAF '92., Proceedings of the Eighth IEEE International Symposium on
Conference_Location :
Greenville, SC
Print_ISBN :
0-7803-0465-9
DOI :
10.1109/ISAF.1992.300724
