DocumentCode
1922997
Title
A New Device Structure And Process Flow For A Low Leakage Pin-diode-based Integrated Detector Array
Author
Snoeys, W. ; Plummer, J. ; Parker, S. ; Kenney, C.
Author_Institution
Center for Integrated Systems, Stanford University, CA
fYear
1991
fDate
17-19 June 1991
Keywords
Circuits; Contacts; Gettering; Infrared detectors; Ionizing radiation; Leak detection; Optical arrays; Radiation detectors; Sensor arrays; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference, 1991. 49th Annual
Conference_Location
Boulder, CO, USA
Print_ISBN
0-87942-647-0
Type
conf
DOI
10.1109/DRC.1991.664680
Filename
664680
Link To Document