Title :
Micromachined Mercury Sensor
Author :
Schambach, Kwan ; Eden, Klaus ; Schumacher, Klaus ; Wiegleb, Gerhard
Author_Institution :
Geminuse G., Dortmund, Germany
fDate :
24-26 September 2002
Keywords :
Bridge circuits; Bridges; Electric resistance; Electrical resistance measurement; Gold; Monitoring; Resistors; Sea measurements; Semiconductor device measurement; Thermal sensors;
Conference_Titel :
Solid-State Device Research Conference, 2002. Proceeding of the 32nd European
Print_ISBN :
88-900847-8-2
DOI :
10.1109/ESSDERC.2002.194963
