DocumentCode
1923069
Title
Micromachined Mercury Sensor
Author
Schambach, Kwan ; Eden, Klaus ; Schumacher, Klaus ; Wiegleb, Gerhard
Author_Institution
Geminuse G., Dortmund, Germany
fYear
2002
fDate
24-26 September 2002
Firstpage
443
Lastpage
446
Keywords
Bridge circuits; Bridges; Electric resistance; Electrical resistance measurement; Gold; Monitoring; Resistors; Sea measurements; Semiconductor device measurement; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 2002. Proceeding of the 32nd European
Print_ISBN
88-900847-8-2
Type
conf
DOI
10.1109/ESSDERC.2002.194963
Filename
1503893
Link To Document