Title :
Clamped-Clamped Beam Micro-Mechanical Resonators in Thick-Film Epitaxial Polysilicon Technology
Author :
Galayko, Dimitri ; Kaiser, Andreas ; Legrand, Bernard ; Buchaillot, Lionel ; Combi, Chantal ; Collard, Dominique
Author_Institution :
IEMN-ISEN UMR CNRS, Lille, France
fDate :
24-26 September 2002
Keywords :
Molecular beam epitaxial growth;
Conference_Titel :
Solid-State Device Research Conference, 2002. Proceeding of the 32nd European
Print_ISBN :
88-900847-8-2
DOI :
10.1109/ESSDERC.2002.194964
