Clamped-Clamped Beam Micro-Mechanical Resonators in Thick-Film Epitaxial Polysilicon Technology

Author

Galayko, Dimitri ; Kaiser, Andreas ; Legrand, Bernard ; Buchaillot, Lionel ; Combi, Chantal ; Collard, Dominique

Author_Institution

IEMN-ISEN UMR CNRS, Lille, France

fYear

2002

fDate

24-26 September 2002

Firstpage

447

Lastpage

450

Keywords

Molecular beam epitaxial growth;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2002. Proceeding of the 32nd European

Print_ISBN

88-900847-8-2

Type

DOI

10.1109/ESSDERC.2002.194964

Filename

1503894

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