Title :
Monolithic Integration of a Novel Microfluidic Device with Silicon Light Emitting Diode-Antifuse and Photodetector
Author :
LeMinh, P. ; Holleman, J. ; Berenschot, J.W. ; Tas, N.R. ; Den Berg, A. Van
Author_Institution :
MESA+ Research Institute, University of Twente, Enschede, The Netherlands
fDate :
24-26 September 2002
Keywords :
Biosensors; CMOS technology; Etching; Light emitting diodes; Microchannel; Microfluidics; Monolithic integrated circuits; Photodetectors; Photodiodes; Silicon;
Conference_Titel :
Solid-State Device Research Conference, 2002. Proceeding of the 32nd European
Print_ISBN :
88-900847-8-2
DOI :
10.1109/ESSDERC.2002.194965
