Title :
Automatic ellipsometry measurement for anisotropic materials
Author :
Li, Yuhua ; You, Bin ; Zhang, Leiqi ; Yao, Xiu
Author_Institution :
Electron Mater. Res. Lab., Xi´an Jiaotong Univ.
fDate :
30 Aug-2 Sep 1992
Abstract :
A novel variable-medium and variable-angle ellipsometry (VMAE) system which is able to make measurements on anisotropic materials is described. A rotating analyzer ellipsometer operates with a variable angle of the laser beam, a variable azimuth of the sample, etc. Using this approach, equations for anisotropic bulk materials and thin films are obtained. The variable equations for the calculation of the optical constants of anisotropic materials can be solved by a PC-type computer combining the Powell, Rosenbrock, and Palmer direct optimization methods. The software structure is described. Experimental results are compared with theoretical values to test the reliability of the system
Keywords :
computerised instrumentation; ellipsometry; lead compounds; lithium compounds; microcomputer applications; optical constants; refractive index measurement; titanium compounds; He-Ne laser; LiNbO3; PC; PLZT; PbLaZrO3TiO3; TiO2 film; VMAE; anisotropic materials; automatic ellipsometry measurement; direct optimization methods; optical constants; refractive index; rotating analyzer ellipsometer; software structure; system reliability testing; thin films; variable angle ellipsometry system; variable equations; Anisotropic magnetoresistance; Azimuth; Ellipsometry; Equations; Geometrical optics; Laser beams; Optical computing; Optical films; Optical materials; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 1992. ISAF '92., Proceedings of the Eighth IEEE International Symposium on
Conference_Location :
Greenville, SC
Print_ISBN :
0-7803-0465-9
DOI :
10.1109/ISAF.1992.300740