Automatic ellipsometry measurement for anisotropic materials

Author

Li, Yuhua ; You, Bin ; Zhang, Leiqi ; Yao, Xiu

Author_Institution

Electron Mater. Res. Lab., Xi´an Jiaotong Univ.

fYear

1992

fDate

30 Aug-2 Sep 1992

Firstpage

613

Lastpage

616

Abstract

A novel variable-medium and variable-angle ellipsometry (VMAE) system which is able to make measurements on anisotropic materials is described. A rotating analyzer ellipsometer operates with a variable angle of the laser beam, a variable azimuth of the sample, etc. Using this approach, equations for anisotropic bulk materials and thin films are obtained. The variable equations for the calculation of the optical constants of anisotropic materials can be solved by a PC-type computer combining the Powell, Rosenbrock, and Palmer direct optimization methods. The software structure is described. Experimental results are compared with theoretical values to test the reliability of the system

Keywords

computerised instrumentation; ellipsometry; lead compounds; lithium compounds; microcomputer applications; optical constants; refractive index measurement; titanium compounds; He-Ne laser; LiNbO₃; PC; PLZT; PbLaZrO3TiO3; TiO₂ film; VMAE; anisotropic materials; automatic ellipsometry measurement; direct optimization methods; optical constants; refractive index; rotating analyzer ellipsometer; software structure; system reliability testing; thin films; variable angle ellipsometry system; variable equations; Anisotropic magnetoresistance; Azimuth; Ellipsometry; Equations; Geometrical optics; Laser beams; Optical computing; Optical films; Optical materials; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 1992. ISAF '92., Proceedings of the Eighth IEEE International Symposium on

Conference_Location

Greenville, SC

Print_ISBN

0-7803-0465-9

Type

conf

DOI

10.1109/ISAF.1992.300740

Filename

300740