Title :
An Ultra-Thin Polycrystalline-Silicon Thin-Film Transistor with SiGe Raised Source/Drain
Author :
Peng, Du-Zen ; Shih, Po-Sheng ; Zan, Hsiao-Wen ; Liao, Ta-Shun ; Chang, Chun-Yen
Author_Institution :
Institute of Electronics, National Chiao Tung University, Taiwan
fDate :
24-26 September 2002
Keywords :
Germanium silicon alloys; Silicon germanium; Thin film transistors;
Conference_Titel :
Solid-State Device Research Conference, 2002. Proceeding of the 32nd European
Print_ISBN :
88-900847-8-2
DOI :
10.1109/ESSDERC.2002.194986
