The spherical pinch plasma radiation source (SPX II) for X-ray UV and deep UV lithography

Summary form only given. The broadband radiation emission of SPX II extends from UV (10 eV) to soft X-rays (1.2 keV), and the relative levels of radiation depend upon the electrical energy stored in the condenser bank. By using appropriate filters like beryllium foils, and a radiochromic film detector at 20 cm from the source, the soft X-ray flux in the 1 keV to 1.2 keV region has been measured at various electric energy levels. SPX II is capable of discharging at a repetition rate of /spl sim/0.1 Hz, and therefore a required dose of radiation at the detector can be obtained by choosing the appropriate number of discharges for a given input electrical energy level. The variation of X-ray power and exposure time required to reach a dose level of 10 mJ/sq. cm, as a function of electrical energy input, is shown.