Title :
MEMS based thin film pressure/temperature sensor for on-line monitoring injection molding
Author :
Luo, R.C. ; Chen, Ogst
Author_Institution :
Dept. of Electr. Eng., Nat. Chung Cheng Univ., Chia Yi, Taiwan
fDate :
31 Aug-4 Sep 1998
Abstract :
Various sensors such as traditional thermocouples and pressure sensors have been used in process monitoring and control. These traditional sensors have several limitations. The authors propose a new approach for measuring information of mold´s core and cavity. They also propose a fabrication process of a thin-film pressure/temperature sensor using the information from micro sensor into core and cavity to realize online monitoring
Keywords :
microsensors; pressure measurement; pressure sensors; process monitoring; temperature measurement; temperature sensors; thin film devices; fabrication process; injection molding; microelectromechanical systems; mould cavity; mould core; online monitoring; process control; process monitoring; thermocouples; thin-film pressure/temperature sensor; Condition monitoring; Data acquisition; Injection molding; Intelligent sensors; Micromechanical devices; Piezoelectric materials; Process control; Temperature sensors; Thermal sensors; Thin film sensors;
Conference_Titel :
Industrial Electronics Society, 1998. IECON '98. Proceedings of the 24th Annual Conference of the IEEE
Conference_Location :
Aachen
Print_ISBN :
0-7803-4503-7
DOI :
10.1109/IECON.1998.722838
