MEMS based thin film pressure/temperature sensor for on-line monitoring injection molding

Author

Luo, R.C. ; Chen, Ogst

Author_Institution

Dept. of Electr. Eng., Nat. Chung Cheng Univ., Chia Yi, Taiwan

Volume

3

fYear

1998

fDate

31 Aug-4 Sep 1998

Firstpage

1306

Abstract

Various sensors such as traditional thermocouples and pressure sensors have been used in process monitoring and control. These traditional sensors have several limitations. The authors propose a new approach for measuring information of mold´s core and cavity. They also propose a fabrication process of a thin-film pressure/temperature sensor using the information from micro sensor into core and cavity to realize online monitoring

Keywords

microsensors; pressure measurement; pressure sensors; process monitoring; temperature measurement; temperature sensors; thin film devices; fabrication process; injection molding; microelectromechanical systems; mould cavity; mould core; online monitoring; process control; process monitoring; thermocouples; thin-film pressure/temperature sensor; Condition monitoring; Data acquisition; Injection molding; Intelligent sensors; Micromechanical devices; Piezoelectric materials; Process control; Temperature sensors; Thermal sensors; Thin film sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Electronics Society, 1998. IECON '98. Proceedings of the 24th Annual Conference of the IEEE

Conference_Location

Aachen

Print_ISBN

0-7803-4503-7

Type

conf

DOI

10.1109/IECON.1998.722838

Filename

722838