DocumentCode :
1925870
Title :
Fabrication of spin-valve sensors with quarter micron trackwidth using a double-layer resist system
Author :
Katakura, Tohru ; Miyauchi, Teiichi ; Mizuguchi, T.
Author_Institution :
Sony Corporation
fYear :
1999
fDate :
18-21 May 1999
Keywords :
Antiferromagnetic materials; Fabrication; Milling; Nonhomogeneous media; Plasma properties; Resists; Sensor phenomena and characterization; Sensor systems; Solvents; Sputter etching;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-5555-5
Type :
conf
DOI :
10.1109/INTMAG.1999.837396
Filename :
837396
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1925870
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