Anodic alumina and titania MIM capacitors - an experimental comparative study

Author

Kannadassan, D. ; Karthik, R. ; Mallick, P.S. ; Baghini, Maryam Shojaei

Author_Institution

VIT Univ., Vellore, India

fYear

2013

fDate

7-9 Jan. 2013

Firstpage

1

Lastpage

4

Abstract

This paper presents the fabrication and comparative study of barrier type Al₂O₃ & TiO₂ Metal-Insulator-Metal (MIM) capacitor using anodic oxidation technique. With high capacitance density (> 5fF/μm²) and low leakage current density (10nA/cm²), both the capacitors show excellent performance and meet the ITRS recommendations for the year 2015. With a detailed study on frequency dependence of capacitance and conduction mechanisms, the evaluation of capacitor performance is done for the RF and Mixed signal applications. The barrier type anodic oxides are suggested as a dielectric material for high performance MIM capacitors.

Keywords

MIM devices; alumina; anodisation; capacitance; capacitors; current density; dielectric materials; leakage currents; mixed analogue-digital integrated circuits; performance evaluation; radiofrequency integrated circuits; titanium compounds; Al₂O₃; ITRS recommendations; RF integrated circuit; TiO₂; anodic alumina; anodic oxidation technique; barrier type anodic oxides; barrier type metal-insulator-metal capacitor; capacitance density; capacitance mechanisms; capacitor performance evaluation; conduction mechanisms; dielectric material; frequency dependence; high performance MIM capacitors; leakage current density; mixed signal integrated circuit; titania MIM capacitors; Artificial intelligence; Capacitors; High K dielectric materials; Performance evaluation; Reliability; Transistors; Alumina; Anodization; Crystalline; High-k; MIM Capacitor; Titania;

fLanguage

English

Publisher

ieee

Conference_Titel

Emerging Trends in VLSI, Embedded System, Nano Electronics and Telecommunication System (ICEVENT), 2013 International Conference on

Conference_Location

Tiruvannamalai

Print_ISBN

978-1-4673-5300-7

Type

conf

DOI

10.1109/ICEVENT.2013.6496586

Filename

6496586