DocumentCode
1929077
Title
New method for negative ion diagnostics
Author
Stamate, E. ; Ohe, K.
Author_Institution
Nagoya Inst. of Technol., Japan
fYear
1997
fDate
19-22 May 1997
Firstpage
303
Abstract
Summary form only given. Recently a "test function" for measurements by Langmuir probes was introduced. This function is very sensitive to the body of electron distribution function (EDF), and useful for a plasma whose EDF is Maxwellian or bi-Maxwellian. The ion density can be also obtained from the test function values around the plasma potential. The test function method is an improved one, which was proposed to obtain the two electron group parameters in the bi-Maxwellian plasma. The method can distinguish the high electron energy group from the low one, even if the former is less than 2% that of the later. In this work we present how to use the test function for the negative ion diagnostics. The numerical procedures for processing a Langmuir probe characteristic in negative ion plasmas is established and errors included in this procedure is estimated.
Keywords
Langmuir probes; argon; functions; plasma density; plasma diagnostics; sulphur compounds; Ar; Langmuir probes; Maxwellian plasma; SF/sub 6/-Ar; biMaxwellian plasma; electron distribution function; electron group parameters; ion density; negative ion diagnostics; negative ion plasmas; plasma diagnostic; plasma potential; test function; Electrons; Plasma confinement; Plasma density; Plasma diagnostics; Plasma materials processing; Plasma measurements; Plasma properties; Plasma temperature; Probes; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
Conference_Location
San Diego, CA, USA
ISSN
0730-9244
Print_ISBN
0-7803-3990-8
Type
conf
DOI
10.1109/PLASMA.1997.605126
Filename
605126
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