Title :
New method for negative ion diagnostics
Author :
Stamate, E. ; Ohe, K.
Author_Institution :
Nagoya Inst. of Technol., Japan
Abstract :
Summary form only given. Recently a "test function" for measurements by Langmuir probes was introduced. This function is very sensitive to the body of electron distribution function (EDF), and useful for a plasma whose EDF is Maxwellian or bi-Maxwellian. The ion density can be also obtained from the test function values around the plasma potential. The test function method is an improved one, which was proposed to obtain the two electron group parameters in the bi-Maxwellian plasma. The method can distinguish the high electron energy group from the low one, even if the former is less than 2% that of the later. In this work we present how to use the test function for the negative ion diagnostics. The numerical procedures for processing a Langmuir probe characteristic in negative ion plasmas is established and errors included in this procedure is estimated.
Keywords :
Langmuir probes; argon; functions; plasma density; plasma diagnostics; sulphur compounds; Ar; Langmuir probes; Maxwellian plasma; SF/sub 6/-Ar; biMaxwellian plasma; electron distribution function; electron group parameters; ion density; negative ion diagnostics; negative ion plasmas; plasma diagnostic; plasma potential; test function; Electrons; Plasma confinement; Plasma density; Plasma diagnostics; Plasma materials processing; Plasma measurements; Plasma properties; Plasma temperature; Probes; Testing;
Conference_Titel :
Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-3990-8
DOI :
10.1109/PLASMA.1997.605126