Title :
Deep trench guard technology to suppress coupling between inductors in silicon RF ICs
Author :
Cheon Soo Kim ; Piljae Park ; Joung-Woo Park ; Nam Hwang ; Hyu Kyu Yu
Author_Institution :
Microelectron. Technol. Lab., Electron. & Telecommun. Res. Inst., Taejeon, South Korea
Abstract :
Trench guard technology was proposed to suppress the coupling between inductors, and to reduce crosstalk in silicon RF ICs. The test structure adopting a deep trench guard ring showed a coupling less than -40 dB in the frequency range of 0.5-20 GHz, and negligible change in designed inductance value up to 10 GHz. Furthermore, it can be also used to isolate a noisy circuit block from other quiet blocks in mixed signal silicon RF ICs.
Keywords :
MMIC; UHF integrated circuits; crosstalk; elemental semiconductors; inductors; integrated circuit noise; isolation technology; mixed analogue-digital integrated circuits; silicon; 0.5 to 20 GHz; Si; Si RF ICs; coupling suppression; crosstalk reduction; deep trench guard technology; mixed signal RFICs; noisy circuit block isolation; Circuit noise; Conductivity; Coupling circuits; Inductance; Inductors; RF signals; Radio frequency; Silicon; Spirals; Transceivers;
Conference_Titel :
Microwave Symposium Digest, 2001 IEEE MTT-S International
Conference_Location :
Phoenix, AZ, USA
Print_ISBN :
0-7803-6538-0
DOI :
10.1109/MWSYM.2001.967273