DocumentCode
1929536
Title
Endurance of Mosfets with Rapid Thermally Deoxidized Nitrided Thin Gate Oxides to Hot Carrier Induced Gidl
Author
Joshi, A.B. ; Kwong, D.L.
Author_Institution
Department of Electrical and Computer Engineering, The University of Texas at Austin
fYear
1991
fDate
17-19 June 1991
Keywords
Dielectric measurements; Electric resistance; Electron traps; Hot carriers; Interface states; MOSFETs; Microelectronics; Stress; Thermal degradation; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference, 1991. 49th Annual
Conference_Location
Boulder, CO, USA
Print_ISBN
0-87942-647-0
Type
conf
DOI
10.1109/DRC.1991.664710
Filename
664710
Link To Document