DocumentCode :
1929826
Title :
Uni-directional liquid spreading realized by laser-based surface structuring
Author :
Fadeeva, Elena ; Koch, Jurgen ; Chichkov, B.N.
Author_Institution :
Laser Zentrum Hannover e.V., Hannover, Germany
fYear :
2013
fDate :
12-16 May 2013
Firstpage :
1
Lastpage :
1
Abstract :
In our work, we suggest a simple one-step method for the fabrication of slanted surface structures. Spikes - self-organized, quasi-periodical arrays of high aspect ratio micro structures - can be fabricated e.g. by laser irradiation of silicon (Si) surfaces in a reactive gas atmosphere (e.g. SF6). Moreover, spikes generation was reported on a wide range of materials, including semiconductors and metals. The geometrical parameters of spikes (their dimensions and density) are mainly controlled by changing the incident laser fluence (laser pulse energy per unit area). Already in the first reports dealing with the generation of spikes, it was established that the spikes always point in opposite direction of the incident laser beam. Therefore, it is possible to generate slanted spikes by mounting samples at different angles to the incident laser beam. We use this method to fabricate slanted spike microstructures.
Keywords :
laser beam effects; laser materials processing; surface structure; wetting; Si; geometrical parameters; incident laser fluence; laser irradiation; laser-based surface structuring; reactive gas atmosphere; silicon surfaces; slanted spike microstructures; slanted surface structures; spikes; uni-directional liquid spreading; Gas lasers; Laser applications; Laser beams; Liquids; Silicon; Surface emitting lasers; Surface structures;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/IQEC), 2013 Conference on and International Quantum Electronics Conference
Conference_Location :
Munich
Print_ISBN :
978-1-4799-0593-5
Type :
conf
DOI :
10.1109/CLEOE-IQEC.2013.6801535
Filename :
6801535
Link To Document :
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