• DocumentCode
    1929826
  • Title

    Uni-directional liquid spreading realized by laser-based surface structuring

  • Author

    Fadeeva, Elena ; Koch, Jurgen ; Chichkov, B.N.

  • Author_Institution
    Laser Zentrum Hannover e.V., Hannover, Germany
  • fYear
    2013
  • fDate
    12-16 May 2013
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    In our work, we suggest a simple one-step method for the fabrication of slanted surface structures. Spikes - self-organized, quasi-periodical arrays of high aspect ratio micro structures - can be fabricated e.g. by laser irradiation of silicon (Si) surfaces in a reactive gas atmosphere (e.g. SF6). Moreover, spikes generation was reported on a wide range of materials, including semiconductors and metals. The geometrical parameters of spikes (their dimensions and density) are mainly controlled by changing the incident laser fluence (laser pulse energy per unit area). Already in the first reports dealing with the generation of spikes, it was established that the spikes always point in opposite direction of the incident laser beam. Therefore, it is possible to generate slanted spikes by mounting samples at different angles to the incident laser beam. We use this method to fabricate slanted spike microstructures.
  • Keywords
    laser beam effects; laser materials processing; surface structure; wetting; Si; geometrical parameters; incident laser fluence; laser irradiation; laser-based surface structuring; reactive gas atmosphere; silicon surfaces; slanted spike microstructures; slanted surface structures; spikes; uni-directional liquid spreading; Gas lasers; Laser applications; Laser beams; Liquids; Silicon; Surface emitting lasers; Surface structures;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Europe (CLEO EUROPE/IQEC), 2013 Conference on and International Quantum Electronics Conference
  • Conference_Location
    Munich
  • Print_ISBN
    978-1-4799-0593-5
  • Type

    conf

  • DOI
    10.1109/CLEOE-IQEC.2013.6801535
  • Filename
    6801535