Title :
A novel adaptive approach to modeling MEMS tunable capacitors using MRTD and FDTD techniques
Author :
Bushyager, N. ; Tentzeris, M.M. ; Gatewood, L. ; DeNatale, J.
Author_Institution :
Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
This paper introduces a novel full wave technique for modeling MEMS tunable capacitors that is based on the coupling of physical motion of the MEMS device with Maxwell´s equations through the modification of the MRTD/FDTD techniques. The difficulties of modeling MEMS devices are discussed, and ways to compensate for several of these are presented. The proposed approach is validated through comparison of simulation results to measurement for an interdigitated capacitor.
Keywords :
Maxwell equations; capacitors; finite difference time-domain analysis; micromechanical devices; semiconductor device models; time-domain analysis; FDTD; MEMS tunable capacitors; MRTD; Maxwell´s equations; full wave technique; interdigitated capacitor; simulation results; Capacitors; Electromagnetic modeling; Electrostatics; Fingers; Finite difference methods; Microelectromechanical devices; Micromechanical devices; Springs; Time domain analysis; Voltage;
Conference_Titel :
Microwave Symposium Digest, 2001 IEEE MTT-S International
Conference_Location :
Phoenix, AZ, USA
Print_ISBN :
0-7803-6538-0
DOI :
10.1109/MWSYM.2001.967303
