Title :
Leaky spots in irradiated SiO2 gate oxides observed with C-AFM
Author :
Porti, M. ; Nafría, M. ; Aymerich, X. ; Cester, A. ; Paccagnella, A. ; Cimino, S.
Author_Institution :
Departament d´´Enginyeria Electronica, Univ. Autonoma de Barcelona, Bellaterra, Spain
Abstract :
A conductive atomic force microscope (C-AFM) has been used to perform a nanometer scale characterization of the electrical properties of irradiated thin SiO2 gate oxides of MOS devices. The results have been compared to those obtained on fresh (without irradiation) and electrically stressed oxides. The electrical images reveal the existence of weak spots, which have been attributed to the electrical damage induced by irradiation. Their I-V characteristics have been registered with the C-AFM. The results show that they have a leaky behaviour, which has been associated to the radiation induced leakage current (RILC).
Keywords :
MIS structures; atomic force microscopy; leakage currents; nanostructured materials; radiation effects; silicon compounds; C-AFM; SiO2; conductive atomic force microscope; electrical properties; irradiated thin gate oxides; irradiation induced electrical damage; leaky spots; nanometer scale characterization; radiation induced leakage current; Conductivity; Current measurement; Density measurement; Electric variables measurement; Microscopy; Stress measurement; Surface topography; Testing; Voltage;
Conference_Titel :
Electron Devices, 2005 Spanish Conference on
Print_ISBN :
0-7803-8810-0
DOI :
10.1109/SCED.2005.1504304
