Title :
Micromachined RF MEMS tunable capacitors using piezoelectric actuators
Author :
Park, J.Y. ; Yee, Y.J. ; Nam, H.J. ; Bu, J.U.
Author_Institution :
Mater. & Devices Lab., LG Electron. Inst. of Technol., Seoul, South Korea
Abstract :
In this paper, RF MEMS tunable capacitors with low operation voltage, high linearity, high quality factor, and large tuning ratio have been fabricated by utilizing micromachined piezoelectric actuators. The fabricated tunable capacitor has a C/sub max//C/sub min/ ratio of 3.1 to 1 at bias voltages of 6 V and a quality factor of 210 at 1 GHz.
Keywords :
Q-factor; capacitors; low-power electronics; microactuators; micromachining; piezoelectric actuators; tuning; 1 GHz; 6 V; RF MEMS tunable capacitor; linearity; low-voltage operation; micromachining; piezoelectric actuator; quality factor; tuning ratio; Capacitance; Capacitors; Electrodes; Micromechanical devices; Piezoelectric actuators; Q factor; Radiofrequency microelectromechanical systems; Tunable circuits and devices; Tuning; Voltage;
Conference_Titel :
Microwave Symposium Digest, 2001 IEEE MTT-S International
Conference_Location :
Phoenix, AZ, USA
Print_ISBN :
0-7803-6538-0
DOI :
10.1109/MWSYM.2001.967330
