DocumentCode
1930687
Title
Digitally controllable variable high-Q MEMS capacitor for RF applications
Author
Hoivik, N. ; Michalicek, M.A. ; Lee, Y.C. ; Gupta, K.C. ; Bright, V.M.
Author_Institution
Dept. of Mech. Eng., Colorado Univ., Boulder, CO, USA
Volume
3
fYear
2001
fDate
20-24 May 2001
Firstpage
2115
Abstract
This paper describes the novel design of an electrostatic digitally controllable variable MEMS capacitor constructed using Cronos MUMPS technology and flip-chip technology processing. The capacitor consists of an array of individual plates of equal area, which are connected to the bonding pads by springs of varying width. This creates a cascading snap-down effect when actuated by electrostatic forces. The capacitor has a measured Q-factor of 140 at 750 MHz, and a tuning ratio of 4:1.
Keywords
Q-factor; capacitors; digital control; electrostatic actuators; flip-chip devices; micromechanical devices; 750 MHz; Cronos MUMPS technology; Q-factor; RF MEMS variable capacitor; electrostatic digital control; flip-chip processing; tuning ratio; Bonding; Capacitance; Capacitors; Digital control; Electrostatics; Gold; Micromechanical devices; Radio frequency; Springs; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 2001 IEEE MTT-S International
Conference_Location
Phoenix, AZ, USA
ISSN
0149-645X
Print_ISBN
0-7803-6538-0
Type
conf
DOI
10.1109/MWSYM.2001.967331
Filename
967331
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