Title :
An electromechanical model for MEMS switches
Author :
Mercier, D. ; Blondy, P. ; Cros, D. ; Guillon, P.
Author_Institution :
IRCOM, Limoges, France
Abstract :
This paper presents a new dynamic and parametric model of a capacitive micro-electromechanical switch electro-statically actuated. It is built of elementary electrical equivalent-circuit blocks constructed of voltage-controlled current sources. The model describes the nonlinear mechanical behavior of the membrane movement, which allows the computation or the bridge capacitance. It can be inserted as a model to perform simulations at microwave frequencies. All the switch parameters such as dimensions and materials properties are adjustable.
Keywords :
electrostatic actuators; equivalent circuits; micromechanical devices; microwave switches; RF MEMS switch; bridge capacitance; dynamic parametric model; electrostatic actuation; equivalent circuit; membrane; microwave simulation; nonlinear electromechanical model; voltage controlled current source; Biomembranes; Bridge circuits; Capacitance; Computational modeling; Material properties; Microswitches; Microwave frequencies; Parametric statistics; Switches; Voltage;
Conference_Titel :
Microwave Symposium Digest, 2001 IEEE MTT-S International
Conference_Location :
Phoenix, AZ, USA
Print_ISBN :
0-7803-6538-0
DOI :
10.1109/MWSYM.2001.967333
