DocumentCode :
1930750
Title :
Novel applications of porous silicon
Author :
Keen, J.M.
Author_Institution :
R.S.R.E. St Andrews Road, Malvern, Worcs. England, WR14 SPS
fYear :
1990
fDate :
10-13 Sept. 1990
Firstpage :
613
Lastpage :
618
Abstract :
Porous silicon is best known for its applications in the oxide isolation of silicon integrated circuits. However, porous silicon is a very versatile material and its unique properties are being researched for a surprising range of applications. These include use as a substrate for epitaxial growth, for the production of ``smart´´ dielectrics, for the location of defects in other silicon-on-insulator materials, for the producion of sensors, for conversion to metal and for the emission of visible light. These and others are described.
Keywords :
Physics; Silicon; Solid state circuits;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid State Device Research Conference, 1990. ESSDERC '90. 20th European
Conference_Location :
Nottingham, England
Print_ISBN :
0750300655
Type :
conf
Filename :
5436280
Link To Document :
بازگشت