Title :
Rapid, low-cost patterning of microstructures in polydimethylsiloxane via mask-less laser-machining
Author :
Sones, C.L. ; Katis, I.N. ; Mills, B. ; Feinaeugle, M. ; Mosayyebi, A. ; Butement, J. ; Eason, Robert W.
Author_Institution :
Optoelectron. Res. Centre, Univ. of Southampton, Southampton, UK
Abstract :
Summary form only given. Polydimethylsiloxane (PDMS), due to its unique characteristics including biocompatibility, possibility to be flexibly moulded into the desired shape, optical transparency, and its low-cost provides a valuable advantage as a building material for the fabrication of microfluidics-based lab-on-chip devices and micro-contact printing [1, 2] moulds that allow parallel deposition of various materials on a target surface. A range of methodologies such as wet chemical etching, dry plasma etching, decal transfer microlithography, and bond-detach method have been utilised for creating patterns in PDMS. However, one of the most commonly used approaches for the prototyping of PDMS for such applications is soft-lithography. This involves the use of a clean-room based UV-lithography step that uses expensive custom-designed masks for the fabrication of a master-mould with structures that are then duplicated via stamping of this master to produce a secondary-mould in PDMS, which is then used for micro-contact printing applications. Even though this lithographic procedure can routinely produce high-resolution micron-scale structures, the procedure is time-consuming and expensive. Instead, for the production of the master, we propose as a cheap alternative to expensive UV-lithography, a mask-less laser-based procedure which does not rely on cleanroom access. Similar to the soft-lithographic procedure, the process is two-step and allows the creation of high-quality sub-micron to millimetre-scale features, in a wide range of materials, with the added advantage of being able to fabricate complex and differently-shaped structures adjacent to each other, in either a sequential or a single-step. This laser-based method (Fig.1) has been used to create two-dimensional surface relief patterns in a master-mould for replication into PDMS and subsequent contact-printing.
Keywords :
laser beam machining; laser materials processing; masks; micro-optics; microfabrication; moulding; optical fabrication; optical polymers; PDMS prototyping; bond-detach method; clean-room based UV-lithography step; custom-designed masks; decal transfer microlithography method; dry plasma etching method; high-quality submicron-to-millimetre-scale features; mask-less laser-machining; master-mould fabrication; material deposition; microcontact printing applications; microfluidics-based lab-on-chip device fabrication; optical transparency; polydimethylsiloxane microstructure patterning; soft-lithographic procedure; wet chemical etching method; Fabrication; Films; Printing; Shape; Surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/IQEC), 2013 Conference on and International Quantum Electronics Conference
Conference_Location :
Munich
Print_ISBN :
978-1-4799-0593-5
DOI :
10.1109/CLEOE-IQEC.2013.6801592