DocumentCode
1931339
Title
Planarization and apex angle control for write head fabrication using SOG
Author
Li, Shuxiang ; Soares, V. ; Bernardo, J. ; Silva, F. ; Wang, Jianguo ; Freitas, P.P.
Author_Institution
INESC
fYear
1999
fDate
18-21 May 1999
Keywords
Artificial intelligence; Etching; Fabrication; Magnetic heads; Planarization; Plasma temperature; Resins; Resists; Scanning electron microscopy; Surface topography;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-5555-5
Type
conf
DOI
10.1109/INTMAG.1999.837711
Filename
837711
Link To Document