Title :
Planarization and apex angle control for write head fabrication using SOG
Author :
Li, Shuxiang ; Soares, V. ; Bernardo, J. ; Silva, F. ; Wang, Jianguo ; Freitas, P.P.
Author_Institution :
INESC
Keywords :
Artificial intelligence; Etching; Fabrication; Magnetic heads; Planarization; Plasma temperature; Resins; Resists; Scanning electron microscopy; Surface topography;
Conference_Titel :
Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-5555-5
DOI :
10.1109/INTMAG.1999.837711
