K-band direct detect MMIC Si micromachined radiometer

This paper describes the design of a K-Band direct detect MMIC radiometer using bulk micromachining techniques to create the conformal package, interconnecting structures and CPW-fed slot-coupled patch antenna array. Parylene encapsulation is used following die-attach and wire bonding. Also, a unique on-board calibration technique using an MHEMT based cold/warm noise source offers an alternative to other forms of calibration of radiometers and radar receivers. Experimental results are given for the 20.7 GHz radiometer printed on high-resistivity silicon.