Title :
The impact of technology errors on the operability of the micromechanical gyroscope
Author :
Kazakin, Alexey N. ; Lubeznov, V.S. ; Karelin, Alexey
Author_Institution :
Saint Petersburg State Polytech. Univ., Saint-Petersburg, Russia
Abstract :
The origins of parameters deviation for MEMS, made in a MEMS and microtechnology research laboratory are analyzed. The relationship between the technology size deviation and the bare resonance mode is obtained, and the MEMS gyro sensitivity threshold is estimated.
Keywords :
gyroscopes; microsensors; resonance; sensitivity analysis; MEMS gyro sensitivity threshold; MEMS parameter deviation; bare resonance mode; gyroscope operability; micromechanical gyroscope; technology errors; technology size deviation; Chemical sensors; Chemical technology; Gyroscopes; Laboratories; Manufacturing; Mechanical sensors; Micromechanical devices; Resonance; Resonant frequency; Silicon;
Conference_Titel :
Electron Devices and Materials, 2003. Proceedings. 4th Annual 2003 Siberian Russian Workshop on
Print_ISBN :
5-7782-0412-4
DOI :
10.1109/SREDM.2003.1224180
