Title :
Design and optimization of a MSM photodetector based on poly-Si layer
Author :
Budianu, Elena ; Purica, Munizer ; Manea, Elena ; Danila, Mihai ; Gavrila, Raluca ; Oprea, Isabella
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania
Abstract :
The photoresponse of the metal-semiconductor-metal photodiode (MSM-PD) is analyzed in dependence with structure geometry for optimization the operating speed and responsivity. The results were applied for an experimental MSM-PD structure made on thin film of polycrystalline silicon deposited by LPCVD on a substrate of silicon covered with a SiO2 layer. Advantages of a high bandwidth in the GHz range, easy to fabricate and especially the compatible technological processes with Si VLSI technology make this type of photodetector one of the most attractive for optoelectronic integrated circuits
Keywords :
CVD coatings; elemental semiconductors; metal-semiconductor-metal structures; photodetectors; photodiodes; silicon; MSM photodetector; Si-SiO2; SiO2 layer; design optimization; metal-semiconductor-metal photodiode; polysilicon LPCVD thin film; silicon substrate; Bandwidth; Design optimization; Geometry; Integrated circuit technology; Photodetectors; Photodiodes; Semiconductor thin films; Silicon; Sputtering; Substrates;
Conference_Titel :
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-6666-2
DOI :
10.1109/SMICND.2001.967441
