Photoresponse analysis of the photodetector with planar mirror optical microcavity

Author

Purica, Munizer ; Budianu, Elena ; Cristea, Dana

Author_Institution

Nat. Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania

Volume

1

fYear

2001

fDate

2001

Firstpage

189

Abstract

The dependency of the photoresponse on structural and material parameters was investigated using the expression of quantum efficiency (η) derived for a photodiode with active regions placed inside a planar mirror optical microcavity. This expression takes into account the multiple internal reflection and the wavelength dependence of the top and bottom mirror reflectivity. Experimental results shown the ~40% improvement in the silicon photodiode responsivity at 1060 nm over identical conventional photodiode structure using a two-end planar mirror optical microcavity

Keywords

infrared detectors; micro-optics; micromechanical resonators; mirrors; photodiodes; reflectivity; silicon; 1060 nm; active regions; bottom mirror reflectivity; material parameters; multiple internal reflection; photodetector; photodiode; photoresponse analysis; planar mirror optical microcavity; quantum efficiency; silicon photodiode responsivity; structural parameters; top mirror reflectivity; wavelength dependence; High speed optical techniques; Microcavities; Mirrors; Optical devices; Optical refraction; Optical sensors; Optical signal processing; Optical variables control; Photodetectors; Photodiodes;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2001. CAS 2001 Proceedings. International

Conference_Location

Sinaia

Print_ISBN

0-7803-6666-2

Type

conf

DOI

10.1109/SMICND.2001.967443

Filename

967443