Title :
Thin membranes obtained by surface micromachining-Preliminary study for a Fabry-Perot interferometer
Author :
Muller, Raluca ; Manea, Elena ; Kusko, Mihai
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania
Abstract :
We report on thin membrane manufacture by surface micromachining. We realized two types of membranes. The first one consists of a stack of SiO2/Si3N4/SiO2 layers and the second consists of a polysilicon layer. We present simulations for the reflectivity response of the polysilicon membrane. The structure can be used as a Fabry-Perot microcavity for an opto-mechanical pressure sensor
Keywords :
Fabry-Perot interferometers; Fabry-Perot resonators; micro-optics; micromachining; micromechanical resonators; optical fabrication; optical sensors; pressure sensors; reflectivity; Fabry-Perot interferometer; Fabry-Perot microcavity; SiO2-Si3N4-SiO2; SiO2/Si3N4/SiO2 layers; opto-mechanical pressure sensor; polysilicon layer; polysilicon membrane; reflectivity response; surface micromachining; thin membranes; Biomembranes; Chemical sensors; Etching; Fabry-Perot interferometers; Microcavities; Micromachining; Mirrors; Optical interferometry; Reflectivity; Silicon compounds;
Conference_Titel :
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-6666-2
DOI :
10.1109/SMICND.2001.967444
