• DocumentCode
    1932910
  • Title

    Possibility of porous solids application for gas sensing devices

  • Author

    Leonov, Ilya A. ; Gunov, Maxim S Mel

  • Author_Institution
    Inst. of Semicond. Phys., Novosibirsk, Russia
  • fYear
    2003
  • fDate
    1-4 July 2003
  • Firstpage
    105
  • Lastpage
    106
  • Abstract
    This paper is devoted to the experimental study of various porous materials and films physical properties during adsorption of organic vapors. The possibility of using these porous sensing cells for organic vapor sensors is discussed.
  • Keywords
    adsorption; carbon; gas sensors; porous materials; silicon compounds; C; SiO2; adsorption; gas sensing devices; organic vapor sensors; porous films; porous sensing cells; porous solids; Computerized monitoring; Fuels; Organic materials; Polymer films; Semiconductor films; Sensor phenomena and characterization; Sensor systems; Silicon compounds; Solids; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Materials, 2003. Proceedings. 4th Annual 2003 Siberian Russian Workshop on
  • Print_ISBN
    5-7782-0412-4
  • Type

    conf

  • DOI
    10.1109/SREDM.2003.1224197
  • Filename
    1224197
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1932910