DocumentCode
1933411
Title
A new improved electrical vernier to measure mask misalignment
Author
Morrow, D. ; Walton, A.J. ; Gammie, W.R. ; Fallon, M. ; Stevenson, J.T.M. ; Holwill, R.J.
Author_Institution
Edinburgh Microfabrication Facility, University of Edinburgh, Edinburgh, EH9 3JL; Digital, South Queensferry, West Lothian, EH30 9SH
fYear
1990
fDate
10-13 Sept. 1990
Firstpage
85
Lastpage
88
Abstract
A new interconnect scheme is proposed which reduces the pad to tooth ratio for passive electrical verniers. This design is based upon the maximum theoretical number of direct connections between N pads which is N(N¿1)/2. This concept is developed further and it is demonstrated that the use of diodes can reduce the ratio to N (N¿1): N. Some experimental results are also presented.
Keywords
Ammeters; Circuit testing; Current measurement; Digital integrated circuits; Diodes; Electric variables measurement; Fluid flow measurement; Integrated circuit testing; Resistors; Teeth;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1990. ESSDERC '90. 20th European
Conference_Location
Nottingham, England
Print_ISBN
0750300655
Type
conf
Filename
5436396
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