DocumentCode

1933657

Title

PABLO vs. Double-Poly - A Comparison of Two High-Performance Bipolar Technologies

Author

van Es, R.A. ; Noorlag, D.J.W.

Author_Institution

Philips Research Laboratories, P.O. Box 80000, 5600 JA Eindhoven, The Netherlands

fYear

1987

fDate

14-17 Sept. 1987

Firstpage

283

Lastpage

285

Keywords

Anisotropic magnetoresistance; Bipolar transistors; Boron; Capacitance; Dry etching; Grain size; Impurities; Laboratories; Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Device Research Conference, 1987. ESSDERC '87. 17th European

Conference_Location

Bologna, Italy

Print_ISBN

0444704779

Type

conf

Filename

5436406