Title :
Rod-type microelectromechanical sensor
Author :
Efremov, G.I. ; Mukhurov, N.L.
Author_Institution :
Inst. of Electron., Acad. of Sci., Minsk, Belarus
Abstract :
Miniature high-sensitivity sensors are described, the kinematical scheme of which comprises a system of curvilinear rods formed of a single plate. Their simplicity, reliability, high target parameters and universality are shown. It is proposed to realize concrete designs of such sensors on the basis of anodic alumina technology
Keywords :
alumina; kinematics; microsensors; Al2O3; anodic alumina technology; curvilinear rods; kinematical scheme; miniature high-sensitivity sensors; reliability; rod-type microelectromechanical sensor; rod-type two-step sensor; single plate; step rod squeeze scheme; step rod tension scheme; Concrete; Control systems; Electromechanical sensors; Electromechanical systems; Gears; Microelectronics; Monitoring; Sensor phenomena and characterization; Sensor systems; Temperature sensors;
Conference_Titel :
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-6666-2
DOI :
10.1109/SMICND.2001.967484
