DocumentCode
1933957
Title
Rod-type microelectromechanical sensor
Author
Efremov, G.I. ; Mukhurov, N.L.
Author_Institution
Inst. of Electron., Acad. of Sci., Minsk, Belarus
Volume
2
fYear
2001
fDate
37165
Firstpage
363
Abstract
Miniature high-sensitivity sensors are described, the kinematical scheme of which comprises a system of curvilinear rods formed of a single plate. Their simplicity, reliability, high target parameters and universality are shown. It is proposed to realize concrete designs of such sensors on the basis of anodic alumina technology
Keywords
alumina; kinematics; microsensors; Al2O3; anodic alumina technology; curvilinear rods; kinematical scheme; miniature high-sensitivity sensors; reliability; rod-type microelectromechanical sensor; rod-type two-step sensor; single plate; step rod squeeze scheme; step rod tension scheme; Concrete; Control systems; Electromechanical sensors; Electromechanical systems; Gears; Microelectronics; Monitoring; Sensor phenomena and characterization; Sensor systems; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location
Sinaia
Print_ISBN
0-7803-6666-2
Type
conf
DOI
10.1109/SMICND.2001.967484
Filename
967484
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