DocumentCode
1933982
Title
Influence of the operating condition on the poly[tetradecylmethylsiloxane] coated quartz microbalances for heavy hydrocarbon sensing
Author
Oprea, A.
Author_Institution
Nat. Inst. of Material Phys., Bucharest-Magurele, Romania
Volume
2
fYear
2001
fDate
37165
Firstpage
367
Abstract
Coated quartz microbalances have been produced by spraying a dichloremethan solution of poly [tetradecylmethylsiloxane] on usual, 10 MHz, AT-cut quartz resonators. Standard sensitivity tests have been performed in a computer controlled system for gases and vapours mixing. The influence of the driving oscillator type, working temperature, and humidity is observed and discussed
Keywords
crystal resonators; gas sensors; microbalances; organic compounds; polymer films; quartz; spray coatings; 10 MHz; AT-cut quartz resonator; SiO2; computer controlled system; dichloromethane solution; driving oscillator; gas sensor; heavy hydrocarbon detection; humidity dependence; poly[tetradecylmethylsiloxane] coating; quartz microbalance; spray coating; temperature dependence; Control systems; Gases; Hydrocarbons; Oscillators; Performance evaluation; Polymer films; Resonance; Resonant frequency; Spraying; Weight control;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2001. CAS 2001 Proceedings. International
Conference_Location
Sinaia
Print_ISBN
0-7803-6666-2
Type
conf
DOI
10.1109/SMICND.2001.967485
Filename
967485
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