• DocumentCode
    1934189
  • Title

    Effect of substrate origin and annealing conditions on stability of electrical conductivity of SnO2 thin polycrystalline films

  • Author

    Ivashchenko, Anatolii ; Kerner, Iacov ; Maronchuck, I.

  • Author_Institution
    Inst. of Appl. Phys., Acad. of Sci. of Moldova, Chisinau, Moldova
  • Volume
    2
  • fYear
    2001
  • fDate
    37165
  • Firstpage
    391
  • Abstract
    The variation of electrical conductivity in SnO2 thin films induced by their annealing in air or vacuum the temperature range from 380 to 750°C is considered. Substrate origin as well as ambient atmosphere of annealing plays principal role in stability of film properties
  • Keywords
    annealing; electrical conductivity; semiconductor materials; semiconductor thin films; substrates; thermal stability; tin compounds; 380 to 750 C; SnO2; SnO2 polycrystalline thin film; annealing; electrical conductivity; stability; substrate origin; Annealing; Atmosphere; Conductive films; Conductivity; Heat treatment; Semiconductor films; Stability; Substrates; Temperature dependence; Temperature distribution;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 2001. CAS 2001 Proceedings. International
  • Conference_Location
    Sinaia
  • Print_ISBN
    0-7803-6666-2
  • Type

    conf

  • DOI
    10.1109/SMICND.2001.967491
  • Filename
    967491
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1934189