• DocumentCode
    1934328
  • Title

    Low leakage current evaluations for process characterizations

  • Author

    Girard, P. ; Pistoulet, B. ; Nouet, P.

  • Author_Institution
    Laboratoire d´´Automatique et de Microelectronique de Montpellier (U.A. D03710 CNRS), Université de Montpellier II: Sciences et Techniques du Languedoc, Pl. E. Bataillon, 34095 MONTPELLIER Cedex 5, FRANCE
  • fYear
    1990
  • fDate
    10-13 Sept. 1990
  • Firstpage
    197
  • Lastpage
    200
  • Abstract
    In this paper the principle of operation of a structure allowing accurate determination of currents in the fA range is given. A device has been implemented on silicon and experimentally tested. The capability of 0.1 fA range measurements is demonstrated.
  • Keywords
    Area measurement; Capacitance measurement; Charge measurement; Current measurement; Energy measurement; Leakage current; Length measurement; MOSFETs; Testing; Time measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 1990. ESSDERC '90. 20th European
  • Conference_Location
    Nottingham, England
  • Print_ISBN
    0750300655
  • Type

    conf

  • Filename
    5436436
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1934328