• DocumentCode
    1934674
  • Title

    3D Integration of GaAs MESFET and varactor diode for a VCO-MMIC

  • Author

    Joseph, M. ; Roth, B. ; Scheffer, F. ; Meschede, H. ; Beyer, A. ; Helme, K.

  • fYear
    1990
  • fDate
    10-13 Sept. 1990
  • Firstpage
    229
  • Lastpage
    232
  • Abstract
    For the optimization of MESFET and varactor diode in a monolithic microwave integrated circuit (MMIC) different epitaxial layer structures are required. We report on the 3-d integration of the different devices by stacking the specific layers upon each other. DC and RF performances of the integrated FET are improved introducing an insulating layer sequence. A voltage controlled oscillator (VCO) has been realized with the first design for a frequency of oscillation of 9 GHz.
  • Keywords
    Diodes; Gallium arsenide; MESFET integrated circuits; MMICs; Microwave FET integrated circuits; Microwave devices; Microwave integrated circuits; Monolithic integrated circuits; Varactors; Voltage-controlled oscillators;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 1990. ESSDERC '90. 20th European
  • Conference_Location
    Nottingham, England
  • Print_ISBN
    0750300655
  • Type

    conf

  • Filename
    5436450