DocumentCode
1934786
Title
Atomistic analysis of annealing behavior of amorphous regions
Author
López, Pedro ; Pelaz, Lourdes ; Marques, Luis A. ; Santos, Ivan ; Aboy, María ; Barbolla, Juan
Author_Institution
Dpto. de Electricidad y Electronica, Univ. de Valladolid, Spain
fYear
2005
fDate
2-4 Feb. 2005
Firstpage
427
Lastpage
430
Abstract
The authors have analyzed the main features regarding the recrystallization of amorphous regions, using an atomistic amorphization-recrystallization model that considers the interstitial-vacancy pair (IV pair) as the building block of the amorphous phase. In the model presented recrystallization is governed by the local rearrangement of atoms, being the local coordination what determines the recrystallization rate. This feature explains why the recrystallization velocity is independent of the depth of the amorphous layer (a-layer). The geometry, and not only the size, is the key factor of amorphous pockets (a-pockets) regrowth. The different annealing behavior of a continuous a-layer and the damage tail are also studied.
Keywords
amorphisation; amorphous semiconductors; annealing; interstitials; recrystallisation; semiconductor doping; amorphous regions; annealing behavior; atomistic analysis; interstitial vacancy pair; local rearrangement; recrystallization; Amorphous materials; Annealing; Atomic measurements; Computational modeling; Computer simulation; Crystallization; Implants; Impurities; Kinetic theory; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices, 2005 Spanish Conference on
Conference_Location
Tarragona
Print_ISBN
0-7803-8810-0
Type
conf
DOI
10.1109/SCED.2005.1504472
Filename
1504472
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