• DocumentCode
    1934786
  • Title

    Atomistic analysis of annealing behavior of amorphous regions

  • Author

    López, Pedro ; Pelaz, Lourdes ; Marques, Luis A. ; Santos, Ivan ; Aboy, María ; Barbolla, Juan

  • Author_Institution
    Dpto. de Electricidad y Electronica, Univ. de Valladolid, Spain
  • fYear
    2005
  • fDate
    2-4 Feb. 2005
  • Firstpage
    427
  • Lastpage
    430
  • Abstract
    The authors have analyzed the main features regarding the recrystallization of amorphous regions, using an atomistic amorphization-recrystallization model that considers the interstitial-vacancy pair (IV pair) as the building block of the amorphous phase. In the model presented recrystallization is governed by the local rearrangement of atoms, being the local coordination what determines the recrystallization rate. This feature explains why the recrystallization velocity is independent of the depth of the amorphous layer (a-layer). The geometry, and not only the size, is the key factor of amorphous pockets (a-pockets) regrowth. The different annealing behavior of a continuous a-layer and the damage tail are also studied.
  • Keywords
    amorphisation; amorphous semiconductors; annealing; interstitials; recrystallisation; semiconductor doping; amorphous regions; annealing behavior; atomistic analysis; interstitial vacancy pair; local rearrangement; recrystallization; Amorphous materials; Annealing; Atomic measurements; Computational modeling; Computer simulation; Crystallization; Implants; Impurities; Kinetic theory; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices, 2005 Spanish Conference on
  • Conference_Location
    Tarragona
  • Print_ISBN
    0-7803-8810-0
  • Type

    conf

  • DOI
    10.1109/SCED.2005.1504472
  • Filename
    1504472