Title :
A Novel Process for Silicide Formation using Dynamic Recoil Mixing
Author :
Haworth, L.I. ; Hill, A.E. ; Holwill, R. ; Pilkington, R ; Robertson, J.M.
Author_Institution :
Edinburgh Microfabrication Facility, Department of Electrical Engineering, University of Edinburgh, Edinburgh EH9 3JL, UK
Keywords :
Annealing; Atomic beams; Atomic layer deposition; Conductivity; Ion beams; Optical films; Silicides; Silicon; Substrates; Temperature;
Conference_Titel :
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location :
Bologna, Italy
