Title :
Microfabricated toroidal planar inductors with different magneuc core schemes for mems and power electronic applications
Author :
Liakopoulos, T.M. ; Ahn, Chong H.
Author_Institution :
Centerfor Microelectronic Sensors and MEMS
Keywords :
Coils; Conductors; Fabrication; Frequency; Inductance measurement; Inductors; Magnetic cores; Magnetic flux; Micromechanical devices; Spirals;
Conference_Titel :
Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-5555-5
DOI :
10.1109/INTMAG.1999.837889
